The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Apr. 21, 2020
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Jong Hee Park, Yongin-si, KR;
Jin Seock Kim, Yongin-si, KR;
Bong Won Lee, Yongin-si, KR;
Sang-woo Kim, Seongnam-si, KR;
Il-Ryong Park, Gimcheon-si, KR;
Bong-Yeon Won, Gimpo-si, KR;
Dae-woo Lee, Seoul, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/06 (2006.01); C23F 1/16 (2006.01); C23F 1/30 (2006.01); H01L 21/3213 (2006.01); C23F 1/02 (2006.01); H05K 3/06 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
C23F 1/30 (2013.01); C23F 1/02 (2013.01); H01L 21/32134 (2013.01); H01L 27/1244 (2013.01); H05K 3/067 (2013.01); H01L 29/7869 (2013.01);
Abstract
A phosphoric acid-free etchant composition and a method of forming a wiring, the composition including about 40 wt % to about 60 wt % of an organic acid compound; about 6 wt % to about 12 wt % of a glycol compound; about 1 wt % to about 10 wt % of nitric acid, sulfuric acid, or hydrochloric acid; about 1 wt % to about 10 wt % of a nitrate salt compound; and water, all wt % being based on a total weight of the phosphoric acid-free etchant composition.