The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2022

Filed:

Sep. 24, 2020
Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Yoshimasa Kobayashi, Nagoya, JP;

Hiroharu Kobayashi, Kasugai-Shi, KR;

Hiroyuki Shibata, Okazaki, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 21/072 (2006.01); H01L 21/02 (2006.01); C30B 29/38 (2006.01);
U.S. Cl.
CPC ...
C01B 21/0722 (2013.01); C01B 21/072 (2013.01); C30B 29/38 (2013.01); H01L 21/02389 (2013.01); H01L 21/02433 (2013.01); C01P 2002/74 (2013.01); C01P 2002/78 (2013.01); C01P 2006/80 (2013.01);
Abstract

An aluminum nitride plate satisfies a 'c1>97.5%', a 'c2>97.0%', a “w1<2.5 degrees”, and a “w1/w2<0.995” where c1 is a c-plane degree of orientation that is defined as a ratio of a diffraction intensity of (002) plane when a surface layer of the aluminum nitride plate is subjected to an X-ray diffraction measurement, and c2 is a c-plane degree of orientation that is defined as a ratio of the diffraction intensity of (002) plane when a portion other than the surface layer of the aluminum nitride plate is subjected to the X-ray diffraction measurement, wherein w1 is a half-value width in an X-ray rocking curve profile of (102) plane of the surface layer and w2 is a half-value width in the X-ray rocking curve profile of (102) plane of the portion other than the surface layer.


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