The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Nov. 20, 2018
Applicant:

Watlow Electric Manufacturing Company, St. Louis, MO (US);

Inventors:

Kevin Ptasienski, O'Fallon, MO (US);

Stanton Hopkins Breitlow, Winona, MN (US);

Mohammad Nosrati, Redwood City, CA (US);

Kevin Smith, Columbia, MO (US);

Brittany Phillips, Saint Louis, MO (US);

Ken Ames, San Jose, CA (US);

Patrick Margavio, Columbia, MO (US);

Kurt English, Columbia, MO (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/06 (2006.01); H05B 3/28 (2006.01); H05B 1/02 (2006.01); H01L 21/67 (2006.01); H01L 23/522 (2006.01); H01L 23/485 (2006.01); C23C 16/458 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H05B 3/06 (2013.01); C23C 16/4586 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01L 23/485 (2013.01); H01L 23/522 (2013.01); H05B 1/0202 (2013.01); H05B 1/0233 (2013.01); H05B 3/28 (2013.01); H05B 2203/005 (2013.01); H05B 2203/007 (2013.01); H05B 2203/014 (2013.01); H05B 2203/016 (2013.01); H05B 2203/035 (2013.01);
Abstract

The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.


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