The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Jan. 23, 2020
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Steve Stoffels, Haasrode, BE;

Stefaan Decoutere, Haasrode, BE;

Assignee:

IMEC VZW, Leuven, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/778 (2006.01); H01L 21/8252 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7813 (2013.01); H01L 21/8252 (2013.01); H01L 29/7788 (2013.01); H01L 29/2003 (2013.01);
Abstract

A vertical power device is disclosed, the device having a top side and a bottom side, and the device comprising (i) a substrate; (ii) a layered group III-Nitride based device stack formed atop the substrate; (iii) a first vertical group III-Nitride based device and a second vertical group III-Nitride based device formed in the group III-Nitride based device stack, wherein the first vertical group III-Nitride based device and the second vertical group III-Nitride based device are electrically connected; and (iv) a first vertical device isolation structure that isolates the first vertical group III-Nitride based device from the second vertical group III-Nitride based device. Also disclosed are a vertical power system integrating vertical power devices and a process for fabricating a vertical power device.


Find Patent Forward Citations

Loading…