The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Sep. 03, 2019
Applicant:

Sandisk Technologies Llc, Addison, TX (US);

Inventors:

Yingda Dong, Los Altos, CA (US);

James Kai, Santa Clara, CA (US);

Christopher J. Petti, Mountain View, CA (US);

Assignee:

SanDisk Technologies LLC, Addison, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/00 (2006.01); H01L 27/11597 (2017.01); H01L 27/1159 (2017.01); G11C 11/22 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/51 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11597 (2013.01); G11C 11/223 (2013.01); H01L 27/1159 (2013.01); H01L 29/516 (2013.01); H01L 29/6684 (2013.01); H01L 29/7827 (2013.01); H01L 29/7869 (2013.01); H01L 29/78391 (2014.09); G11C 11/2255 (2013.01); G11C 11/2257 (2013.01); G11C 11/2273 (2013.01); G11C 11/2275 (2013.01);
Abstract

A memory element is provided that includes a portion of a bit line plug, a portion of a source line plug, a portion of a word line, a portion of a vertical semiconductor pillar disposed between the bit line plug, the source line plug and adjacent the word line, and a gate oxide including a ferroelectric material disposed between the vertical semiconductor pillar and the word line.


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