The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Apr. 09, 2020
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Yuji Ebiike, Tokyo, JP;

Takaya Noguchi, Tokyo, JP;

Yoshinori Ito, Tokyo, JP;

Yoshikazu Ikuta, Tokyo, JP;

Koichi Takayama, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/26 (2020.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); G01R 31/2601 (2013.01); G01R 31/2621 (2013.01); H01L 22/14 (2013.01); H01L 22/20 (2013.01); H01L 22/22 (2013.01);
Abstract

A semiconductor test apparatus includes: a power supply; a high-voltage wire connecting high-voltage terminals of a plurality of semiconductor devices which are objects to be tested to a high-voltage side of the power supply; a low-voltage wire connecting low-voltage terminals of the semiconductor devices to a low-voltage side of the power supply; first switches connected in series to the semiconductor devices respectively, each of the first switches having one end connected to the low-voltage side of the power supply via the low-voltage wire and other end connected to the low-voltage terminal; second switches connected to the semiconductor devices respectively, each of the second switches having one end connected to the high-voltage terminal and other end connected to the low-voltage terminal; and a control circuit controlling the first switches and the second switches.


Find Patent Forward Citations

Loading…