The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Oct. 10, 2018
Hitachi High-tech Corporation, Tokyo, JP;
Hirokazu Tamaki, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A control system of a charged particle beam apparatus obtains a first coefficient by performing multiple resolution analysis based on wavelet transform or discrete wavelet transform on at least a part of an image or a signal acquired by the charged particle beam apparatus. The control system obtains a second coefficient by performing, on at least a part of the first coefficient or an absolute value of the first coefficient, any one of calculation of a maximum value, calculation of a numerical value corresponding to a specified order in an order related to a magnitude, fitting to a histogram, calculation of an average value, and calculation of a total sum.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile