The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Sep. 21, 2020
Rosemount Inc., Shakopee, MN (US);
David Andrew Broden, Andover, MN (US);
Charles Ray Willcox, Hopkins, MN (US);
ROSEMOUNT INC., Shakopee, MN (US);
Abstract
A pressure sensor assembly includes a pressure sensor having a support structure and a sapphire isolation member coupled to the support structure and forming a region between a first surface of the sapphire isolation member and the support structure. A second surface of the sapphire isolation member has a sapphire etch surface formed thereon and is positioned to interface with fluid from or coupled to a process. A process seal is positioned against the second surface of the sapphire isolation member to prevent fluid from passing by the pressure sensor assembly. Electrical leads couple to a polysilicon strain gauge pattern positioned in the region on the first surface of the sapphire isolation member, and the polysilicon strain gauge pattern is configured to generate electrical signals indicative of the pressure of the fluid when the sapphire isolation member deflects responsive to the pressure.