The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Aug. 19, 2019
Applicant:
Shimadzu Corporation, Kyoto, JP;
Inventor:
Junichiro Kozaki, Kyoto, JP;
Assignee:
Shimadzu Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 49/06 (2006.01); F16K 27/04 (2006.01); F04B 49/08 (2006.01); F04B 37/14 (2006.01); F16K 37/00 (2006.01); F04B 51/00 (2006.01); G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
F04B 49/065 (2013.01); F04B 37/14 (2013.01); F04B 49/08 (2013.01); F04B 51/00 (2013.01); F16K 27/04 (2013.01); F16K 37/0041 (2013.01); G05B 23/0283 (2013.01); F04B 2205/13 (2013.01);
Abstract
An estimation device comprises: an oscillation section configured to superimpose an oscillation signal for oscillating a valve body of a vacuum valve provided between a vacuum pump configured to pump gas from a chamber and the chamber on an opening degree signal for driving the valve body; and an estimation section configured to estimate, based on a pressure response of a chamber internal pressure upon oscillation, a pumping characteristic regarding the gas pumped through the vacuum valve.