The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Feb. 23, 2018
Applicant:
Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;
Inventors:
Ekkehart Reinhold, Dresden, DE;
Joerg Faber, Mueglitztal, DE;
Assignee:
VON ARDENNE ASSET GMBH & CO. KG, Dresden, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/30 (2006.01); C23C 14/54 (2006.01); C23C 14/52 (2006.01);
U.S. Cl.
CPC ...
C23C 14/30 (2013.01); C23C 14/52 (2013.01); C23C 14/543 (2013.01);
Abstract
In accordance with various embodiments, an electron beam evaporator can comprise the following: a tubular target; an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam; wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.