The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Sep. 09, 2020
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Inventors:
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/13 (2006.01); B81B 7/00 (2006.01); G01P 15/18 (2013.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0016 (2013.01); G01P 15/132 (2013.01); G01P 15/18 (2013.01); G01P 2015/0862 (2013.01);
Abstract
The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction.