The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2022

Filed:

Jun. 11, 2020
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Kunihito Ide, Chigasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 21/66 (2006.01); H05K 5/00 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); H01L 27/14618 (2013.01); H01L 27/14698 (2013.01); H05K 5/0017 (2013.01);
Abstract

A method includes preparing an electronic component that includes an element plate including an element region provided with a functional element and a peripheral region disposed around the element region, a counter plate facing the element region and the peripheral region, a first resin member disposed between at least one of the element region and the peripheral region and the counter plate, and a second resin member disposed between the peripheral region and the counter plate, applying light to the element plate through the counter plate and the second resin member, and measuring a gap between the counter plate and the element plate based on light reflected between the element plate and the second resin member and light reflected between the counter plate and the second resin member.


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