The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Sep. 21, 2019
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Sung Yong Lee, Anyang-si, KR;
Sang Bok Han, Asan-si, KR;
Dong Hyuk Seo, Cheonan-si, KR;
Bong Kuk Kim, Cheonan-si, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F24D 11/00 (2022.01); H05B 3/68 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01L 21/324 (2013.01); H01L 21/67248 (2013.01); H01L 22/30 (2013.01);
Abstract
A heat treatment method of a substrate includes setting a temperature profile over the course of stabilization to a target temperature after the substrate is loaded as a reference, and controlling a temperature of the hot plate supporting the substrate on the basis of the reference.