The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Jun. 14, 2019
Applicant:
Impact Coatings Ab (Publ), Linköping, SE;
Inventor:
Torbjörn Joelsson, Linköping, SE;
Assignee:
IMPACT COATINGS AB (PUBL), Linköping, SE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32614 (2013.01); C23C 14/3407 (2013.01); H01J 37/32055 (2013.01);
Abstract
An arc source system, comprising a cooling body () and a holder body () adapted to be detachably fastened to said cooling body and for holding a cathode body (), wherein the system comprises a membrane () which is arranged between the holder body and a lower portion () of said cooling body; and wherein said lower portion () of said cooling body is provided with at least one cooling fluid channel (), and wherein said holder body () is provided with an inner fastening arrangement configured to be coupled with a corresponding outer fastening arrangement on a cathode body ().