The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Sep. 06, 2018
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventor:
Taiki Kimura, Kawasaki Kanagawa, JP;
Assignee:
KIOXIA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 30/20 (2020.01); G06F 17/16 (2006.01); G03F 7/20 (2006.01); G06F 3/147 (2006.01); G06F 17/12 (2006.01); G06F 111/10 (2020.01);
U.S. Cl.
CPC ...
G06F 30/20 (2020.01); G03F 7/705 (2013.01); G06F 17/16 (2013.01); G06F 3/147 (2013.01); G06F 17/12 (2013.01); G06F 2111/10 (2020.01);
Abstract
According to one embodiment, a method of displaying model includes: sampling a pattern to acquire an attention point; calculating a spatial or planar distribution that indicates any one of a design density, a lithography target density, a mask transmittance, or an optical image intensity at N points (N being an integer equal to or greater than 1) on the pattern including the attention point; calculating a threshold for the pattern; estimating, based on the distribution and the threshold, N elements respectively corresponding to the N points as a model; and displaying the estimated model.