The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Sep. 04, 2020
Applicants:
Kaneka Corporation, Osaka, JP;
University of Hyogo, Hyogo, JP;
Inventors:
Yuki Kawashima, Osaka, JP;
Shuhei Ozaki, Osaka, JP;
Masamitsu Tachibana, Osaka, JP;
Takeo Watanabe, Hyogo, JP;
Tetsuo Harada, Hyogo, JP;
Assignees:
KANEKA CORPORATION, Osaka, JP;
UNIVERSITY OF HYOGO, Hyogo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
G03F 1/62 (2013.01); G03F 1/64 (2013.01);
Abstract
The present disclosure relates to a pellicle that can achieve both a high EUV transmittance and a uniformity in EUV transmittance by including a graphite thin film having a film thickness of 5 nm or more and 30 nm or less and a surface roughness (Sa) of 0.1 nm or more and 500 nm or less.