The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Jun. 02, 2014
Applicant:
Sensirion Ag, Stafa, CH;
Inventors:
Felix Mayer, Stafa, CH;
Markus Graf, Zurich, CH;
Lukas Burgi, Zurich, CH;
Martina Hitzbleck, Ruschlikon, CH;
Ulrich Muecke, Zurich, CH;
Assignee:
Sensirion AG, Stafa, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); H01L 29/82 (2006.01); H01L 29/84 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/122 (2013.01); G01N 27/128 (2013.01);
Abstract
A gas sensor comprises a set of one or more sensor cells (SC) and a substrate (). Each sensor cell (SC) of the set comprises a sensitive film () built from a sensitive material () covering an area of the substrate (). One or more elevated structures () are manufactured in or around said area for preventing the sensitive material () to expand when being applied thereto.