The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Jun. 08, 2017
Applicant:
Dow Silicones Corporation, Midland, MI (US);
Inventors:
Peng-Fei Fu, Midland, MI (US);
Wonbum Jang, Cheongju, KR;
Assignee:
Dow Silicones Corporation, Midland, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/075 (2006.01); C08G 77/04 (2006.01); C08G 77/46 (2006.01); C08G 77/06 (2006.01); C08G 77/16 (2006.01); G03F 7/023 (2006.01); C08G 77/14 (2006.01); C08G 77/00 (2006.01);
U.S. Cl.
CPC ...
C08G 77/46 (2013.01); C08G 77/045 (2013.01); C08G 77/06 (2013.01); C08G 77/14 (2013.01); C08G 77/16 (2013.01); G03F 7/0233 (2013.01); G03F 7/0392 (2013.01); G03F 7/0757 (2013.01); C08G 77/70 (2013.01);
Abstract
A silsesquioxane resin, photoresist composition comprising the silsesquioxane resin and a photoacid generator, etching mask composition comprising the silsesquioxane resin, products prepared therefrom, methods of making and using same, and manufactured articles and semiconductor devices containing same. The silsesquioxane resin comprises silicon-bonded hydrogen atom T-units and T-units having a silicon-bonded group of formula —CHCHCHCOC(R)or —CH(CH)CHCOC(R), wherein each Ris independently an unsubstituted (C-C)alkyl.