The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2022

Filed:

Sep. 24, 2019
Applicant:

Asi/silica Machinery, Llc, Los Angeles, CA (US);

Inventor:

David McDonald Stirling, Victoria, AU;

Assignee:

ASI/SILICA MACHINERY, LLC, Los Angeles, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03B 37/018 (2006.01); C03B 37/014 (2006.01);
U.S. Cl.
CPC ...
C03B 37/01486 (2013.01); C03B 37/0142 (2013.01); C03B 2207/52 (2013.01); C03B 2207/66 (2013.01); C03B 2207/70 (2013.01);
Abstract

A deposition system for depositing a chemical vapor onto a workpiece is disclosed, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The workpiece is held by a lathe that rotates the workpiece relative to chemical burners that deposit silica soot on the workpiece. The deposition system has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber. Multiple sets of chemical burners are disposed longitudinally along the length of the workpiece. Each set of burners is separated from other sets, such that each set of burners deposit silica particles onto generally different portions of a workpiece. The respective portions include an overlap segment in which one or more burners from one burner set will deposit silica particles on the same portion of the workpiece as one or more burners from another set.


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