The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Mar. 14, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jeonghoon Oh, Saratoga, CA (US);
Jamie Leighton, Palo Alto, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/30 (2012.01); B24B 37/27 (2012.01); H01L 21/67 (2006.01); H01L 21/321 (2006.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
B24B 37/27 (2013.01); B24B 37/30 (2013.01); H01L 21/304 (2013.01); H01L 21/3212 (2013.01); H01L 21/67092 (2013.01);
Abstract
A reinforcement ring can be placed in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring has a substantially vertical cylindrical portion, a flange projecting outwardly from the bottom of the cylindrical portion, and a lip projecting outwardly from a top of the cylindrical portion. The flange projects outwardly farther than the lip.