The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Nov. 20, 2018
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Mikhael El-Khoury, Dresden, DE;
Andres Fabian Lasagni, Grumbach, DE;
Sabri Alamri, Dresden, DE;
Tim Kunze, Dresden, DE;
Bogdan Voisiat, Dresden, DE;
Abstract
An optical arrangement for direct laser interference structuring. A laser beam is directed to a reflecting mirror with inclined surface and strikes a first beam splitter, it is divided into two partial beams and one partial beam is deflected to a focusing element. The second partial laser beam is directed to a first pentamirror and after multiple reflection and/or refraction, the focusing element, or it is directed to a second beam splitter and is divided into a first partial beam and a third partial beam. The partial beams are directed to the focusing element by the first pentamirror and are directed by the focusing element to the surface to be structured interfering with each other. The reflecting mirror is moved in a translational manner, maintaining a 45° angle parallel to the optical axes of the emitted laser beam influencing the interference period Λ.