The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Aug. 22, 2019
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventor:
Yutaka Unno, Handa, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H05B 3/06 (2006.01); H05B 3/26 (2006.01); H01J 37/32 (2006.01); F27D 5/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01J 37/32724 (2013.01); H01L 21/6838 (2013.01); H05B 3/06 (2013.01); H05B 3/265 (2013.01); F27D 5/0031 (2013.01);
Abstract
A ceramic heater includes a ceramic plate having a wafer placement surface on which a wafer is to be placed, and incorporating a resistance heating element therein, and a ceramic tubular shaft having one end joined to a rear surface of the plate. The tubular shaft has a vertical sectional shape including an S-like portion or a curved portion having an inflection point in at least one position, and includes a through-hole penetrating the tubular shaft from the one end to the other end with an axis extending along the vertical sectional shape of the tubular shaft.