The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Mar. 26, 2019
Applicant:

Nagase & Co., Ltd., Osaka, JP;

Inventors:

Tadashi Takano, Columbus, OH (US);

Michihiro Sato, Tokyo, JP;

Assignee:

NAGASE & CO., LTD., Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H01L 21/56 (2006.01); H01L 23/31 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
H01L 21/486 (2013.01); H01L 21/4857 (2013.01); H01L 21/56 (2013.01); H01L 23/3128 (2013.01); H01L 23/49822 (2013.01);
Abstract

The present invention relates to a method for manufacturing a semiconductor device in which a circuit element including a semiconductor chip, and a through conductor connecting an insulation layer in a thickness direction are embedded in the insulation layer. A wiring structure in which a predetermined pattern of wiring conductors is formed along a planar direction on an insulation part is created, and thereafter the wiring structure is sealed in the insulation layer in a state where the wiring structure is erected vertically. Consequently, the wiring conductor of the wiring conductor is caused to function as the through conductor in the insulation layer.


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