The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Apr. 28, 2016
Applicant:
Plansee SE, Reutte, AT;
Inventors:
Andre Dronhofer, Reutte, AT;
Christian Linke, Reutte, AT;
Elisabeth Eidenberger-Schober, Breitenwang, AT;
Assignee:
Plansee SE, Reutte, AT;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3435 (2013.01); H01J 37/3408 (2013.01); H01J 37/3429 (2013.01); H01J 37/3488 (2013.01);
Abstract
A target for a cathode sputtering system has a tubular target body made of a sputtering material and at least one connector piece, which is connected to the target body and projects from the target body, for attaching the target body to the cathode sputtering system. The target body is connected to the at least one connector piece in a vacuum-tight manner and the two are rotationally fixed relative to one another. At least one damper element is provided between the at least one connector piece and the target body.