The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Jun. 29, 2017
Applicant:

Soleras Advanced Coatings Bvba, Deinze, BE;

Inventors:

Ivan Van De Putte, Waregem, BE;

Niek Dewilde, Kruishoutem, BE;

Koen Corteville, Izegem, BE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); H01J 37/32 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32577 (2013.01); H01J 37/3435 (2013.01); H01J 37/3444 (2013.01); H01J 37/3497 (2013.01); C23C 14/34 (2013.01);
Abstract

A power transfer system is described for transfer of electrical power to a sputter target in a sputter device. It comprises a first part comprising a contact surface positionable against a first part of an endblock of the sputter device, a second part inseparably connected to the first part and a third part, and a third part comprising a contact surface positionable against a second part of the endblock or directly against a sputter target when mounted on the endblock. At least two of the three parts are formed as one monolithic piece. One of the parts of the power transfer system is resilient such that, when mounted, the power transfer system is clamped between the first part of the endblock and the second part of the endblock or the sputter target. This part is also responsible for the transfer of electrical power.


Find Patent Forward Citations

Van De Putte, Ivan. (2022). Electrical transfer in an endblock for a sputter device (U.S. Patent No. 11367596). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11367596

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…