The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Jan. 09, 2020
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Firas Sammoura, Dublin, CA (US);

David William Burns, San Jose, CA (US);

Ravindra Vaman Shenoy, Dublin, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 3/041 (2006.01); B06B 1/06 (2006.01); G06F 1/3234 (2019.01); G06F 3/043 (2006.01); G06V 40/13 (2022.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
G06F 3/0416 (2013.01); B06B 1/0622 (2013.01); G06F 1/3262 (2013.01); G06F 3/043 (2013.01); G06V 40/1306 (2022.01); G06F 2203/04105 (2013.01); H01L 41/0825 (2013.01);
Abstract

Implementations of the subject matter described herein relate to sensors including piezoelectric micromechanical ultrasonic transducer (PMUT) sensor elements and arrays thereof. The PMUT sensor elements may be switchable between a non-ultrasonic force detection mode and an ultrasonic imaging mode. A PMUT sensor element may include a diaphragm that is capable of a static displacement on application of a force and is capable of a dynamic displacement when the PMUT sensor element transmits or receives ultrasonic signals. In some implementations, a PMUT sensor element includes a two dimensional-electron gas structure on the diaphragm. The sensors may further include a sensor controller configured to switch between a non-ultrasonic force detection mode and an ultrasonic imaging mode for one or more of the PMUT sensor elements, wherein an applied force is measured in the non-ultrasonic force detection mode and wherein an object is imaged ultrasonically during the ultrasonic imaging mode.


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