The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Oct. 07, 2020
Azbil Corporation, Tokyo, JP;
Tomohisa Tokuda, Chiyoda-ku, JP;
Masayuki Yoneda, Chiyoda-ku, JP;
Hirofumi Tojo, Chiyoda-ku, JP;
Ayumi Tsushima, Chiyoda-ku, JP;
Nozomi Kida, Chiyoda-ku, JP;
AZBIL CORPORATION, Tokyo, JP;
Abstract
A sensor element includes a sensor chip and a diaphragm base joined to a surface of the sensor chip. The sensor chip includes a first diaphragm for measuring differential pressure between a first pressure and a second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The diaphragm base includes a third diaphragm to directly receive a fluid that is a measurement target and has the first pressure, and a fourth diaphragm to directly receive a fluid that is a measurement target and having the second pressure. The sensor element has a liquid amount adjustment chamber to make an amount of a first pressure transmission medium filled in a first pressure introduction path and an amount of a second pressure transmission medium filled in a second pressure introduction path to be equal to each other.