The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Oct. 02, 2017
Sciosense B.v., AE Eindhoven, NL;
Willem Frederik Adrianus Besling, JN Eindhoven, NL;
Casper Van Der Avoort, TG Waalre, NL;
Coenraad Cornelis Tak, JS Waalre, NL;
Remco Henricus Wilhelmus Pijnenburg, AE Hoogeloon, NL;
Olaf Wunnicke, PR Eindhoven, NL;
Martijn Goossens, AT Veldhoven, NL;
SCIOSENSE B.V., AE Eindhoven, NL;
Abstract
In an embodiment, a semiconductor device includes a substrate body, an environmental sensor, a cap body and a volume of gas, wherein the environmental sensor and the volume of gas are arranged between the substrate body and the cap body in a vertical direction which is perpendicular to a main plane of extension of the substrate body, wherein at least one channel between the substrate body and the cap body connects the volume of gas with an environment of the semiconductor device such that the channel is permeable for gases, and wherein a thickness of the substrate body amounts to at least 80% of a thickness of the cap body and at most 120% of the thickness of the cap body.