The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Nov. 21, 2019
Applicant:

Denso Corporation, Kariya, JP;

Inventor:

Tomoya Jomori, Kariya, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5747 (2012.01); H01L 41/113 (2006.01); G01C 19/5762 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5747 (2013.01); G01C 19/5762 (2013.01); H01L 41/1132 (2013.01); H01L 41/1134 (2013.01);
Abstract

An angular velocity sensor includes: a substrate; a drive beam supported via a support member with a fixing part; a drive weight supported with the drive beam; a detection weight supported via a beam part including a detection beam with the drive weight; and a detection part in the detection beam generating an electric output corresponding to a displacement of the detection beam when an angular velocity is applied. When the angular velocity is applied while the drive weight and the detection weight vibrate and are driven by the drive beam, the detection beam is displaced in a direction intersecting the vibration direction. The angular velocity is detected based on a change of an output voltage of a detection piezoelectric film in accordance with a displacement of the detection beam.


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