The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Sep. 20, 2018
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Andreas Lassl, Korntal-Muenchingen, DE;

Matthias Kuehnel, Boeblingen, DE;

Niels Bode, Stuttgart, DE;

Nils Felix Kuhlmann, Ehningen, DE;

Peter Degenfeld-Schonburg, Renningen, DE;

Reinhard Neul, Stuttgart, DE;

Frank Schatz, Kornwestheim, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5733 (2012.01); G02B 26/08 (2006.01); H03H 9/02 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5733 (2013.01); G02B 26/0841 (2013.01); H03H 9/02433 (2013.01); B81B 3/0045 (2013.01); B81B 2201/0242 (2013.01); H03H 9/02409 (2013.01); H03H 2009/02456 (2013.01); H03H 2009/02527 (2013.01);
Abstract

A MEMS device and a corresponding operating method. The MEMS device is equipped with an oscillatory micromechanical system, which is excitable in a plurality of useful modes, the oscillatory micromechanical system including at least one system component, which is excitable in at least one parasitic spurious mode by a superposition of the useful modes. An adjusting device is provided, which is configured in such a way that it counteracts the parasitic spurious mode by application of an electromagnetic interaction to the system component.


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