The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Jan. 21, 2022
Applicant:
Guangdong University of Technology, Guangzhou, CN;
Inventors:
Lanyu Zhang, Guangzhou, CN;
Jian Gao, Guangzhou, CN;
Junlang Liang, Guangzhou, CN;
Yun Chen, Guangzhou, CN;
Yunbo He, Guangzhou, CN;
Xin Chen, Guangzhou, CN;
Assignee:
GUANGDONG UNIVERSITY OF TECHNOLOGY, Guangzhou, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/008 (2006.01); G01B 5/00 (2006.01); G01B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01B 5/0021 (2013.01); G01B 3/008 (2013.01); G01B 5/0007 (2013.01);
Abstract
An XY macro-micro motion stage and a control method thereof based on end feedback. The XY macro-micro motion stage includes a fine-adjusting assembly, a macro-driving assembly and an XY position detecting device. The macro-driving assembly includes an X-direction macro-driving unit, a Y-direction macro-driving unit, an X-direction mounting plate and a Y-direction mounting plate. The XY position detecting device is configured to obtain its position on the X axis and Y axis.