The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Oct. 15, 2018
Applicant:

Anumecs Bv, Merksem, BE;

Inventor:

Dirk Verdyck, Merksem, BE;

Assignee:

ANUMECS BV, Merksem, BE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02K 11/01 (2016.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01); C23C 14/35 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); H01J 37/3435 (2013.01); H02K 11/014 (2020.08); C23C 14/35 (2013.01);
Abstract

A termination unit for a deposition system, comprising a device for effecting a function, the device comprising at least one component comprising electrical steel, and at least one shielding element which is electrically conductive. The shielding element is configured so: an effect of a neighboring current on the component comprising electrical steel, which is not contributing to the function of the device, is mitigated, wherein this neighboring current has a first topology; and so an effect of at least one neighboring current having a different topology than the first topology is not significantly mitigated. The device moreover comprises a current transfer means neighboring the at least one component comprising electrical steel, and adapted for guiding a current according to the first topology and for transferring power to a target when mounted on the termination unit.


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