The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Jan. 19, 2017
The Regents of the University of California, Oakland, CA (US);
Shadi A. Dayeh, San Diego, CA (US);
Renjie Chen, Albuquerque, NM (US);
Sang Heon Lee, La Jolla, CA (US);
Ren Liu, La Jolla, CA (US);
Yun Goo Ro, La Jolla, CA (US);
Atsunori Tanaka, La Jolla, CA (US);
Yoontae Hwang, Seoul, KR;
The Regents of the University of California, Oakland, CA (US);
Abstract
A nanowire probe sensor array including a substrate with a metal pattern thereon. An array of semiconductor vertical nanowire probes extends away from the substrate, and at least some of probes, and preferably all, are individually electrically addressed through the metal pattern. The metal pattern is insulated with dielectric, and base and stem portions of the nanowires are also preferably insulated. A fabrication process patterns metal connections on a substrate. A semiconductor substrate is bonded to the metal pattern. The semiconductor substrate is etched to form the neural nanowire probes that are bonded to the metal pattern. Dielectric is then deposited to insulate the metal pattern.