The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2022

Filed:

Sep. 21, 2020
Applicant:

Shenzhen Goodix Technology Co., Ltd., Shenzhen, CN;

Inventors:

Bin Lu, Shenzhen, CN;

Jian Shen, Shenzhen, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 27/08 (2006.01);
U.S. Cl.
CPC ...
H01L 28/90 (2013.01); H01L 27/0805 (2013.01);
Abstract

A capacitor includes: a semiconductor substrate including at least one substrate trench group; at least one laminated structure, each laminated structure includes n conductive layers and m dielectric layers, the first conductive layer in the n conductive layers is disposed above the semiconductor substrate and in the substrate trench group, the i-th conductive layer in the n conductive layers is provided with the i-th conductive layer trench group, and the (i+1)th conductive layer in the n conductive layers is disposed above the i-th conductive layer and in the i-th conductive layer trench group, where m, n, and i are positive integers, and n≥2, 1≤i≤n−1; a first external electrode connected to some conductive layers; and a second external electrode connected to other conductive layers.


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