The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
Jan. 06, 2020
Applicant:
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd., Shenzhen, CN;
Inventor:
Tian Ou, Guangdong, CN;
Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 29/49 (2006.01); G02F 1/1335 (2006.01); G02F 1/1368 (2006.01); G02F 1/1362 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1244 (2013.01); G02F 1/1368 (2013.01); G02F 1/133514 (2013.01); H01L 27/1288 (2013.01); H01L 29/4908 (2013.01); G02F 1/13629 (2021.01); G02F 2201/50 (2013.01);
Abstract
The present application provides a method of manufacturing an array substrate, the array substrate, and a display device. In the method, a photoresist layer is removed by a plasma cleaning technique after performing etching to prevent a gate electrode of the array substrate from contacting a stripping solution, thereby preventing a metal layer of the gate electrode from being corroded by the stripping solution.