The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
Nov. 04, 2019
Semes Co., Ltd., Cheonan-si, KR;
Seung Hoon Oh, Cheonan-si, KR;
Jin Tack Yu, Asan-si, KR;
Bu Young Jung, Cheonan-si, KR;
Byung Sun Bang, Hwaseong-si, KR;
Young Jin Kim, Seoul, KR;
Young Jun Choi, Asan-si, KR;
Jong Hyeon Woo, Asan-si, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
An embodiment of the present invention provides a substrate processing method. The substrate processing method, which performs a liquid processing process by injecting a processing liquid on a substrate on a spin chuck disposed inside a plurality of recovery cups that are disposed in multiple layers, includes: in a transitional period of time in which height change of any one of the recovery cups occurs, adjusting rotational speed of the spin chuck, which is configured to support the substrate, in conjunction with the height change of the recovery cup.