The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
Apr. 15, 2020
Applied Materials, Inc., Santa Clara, CA (US);
John Joseph Mazzocco, San Jose, CA (US);
Cory Eugene Lafollett, Santa Clara, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of a process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a multi-cathode processing chamber includes: a first rotatable shield coupled to a first shaft, wherein the first rotatable shield includes a base, a conical portion extending downward and radially outward from the base, and one or more holes formed through the conical portion, wherein no two holes of the one or more holes are diametrically opposed; and a second rotatable shield coupled to a second shaft concentric with the first shaft, wherein the second rotatable shield is disposed in the first rotatable shield, and wherein the first rotatable shield is configured to rotate independent of the first rotatable shield.