The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2022

Filed:

Aug. 04, 2017
Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Masashi Fukaya, Tokyo, JP;

Eiichiro Takada, Tokyo, JP;

Takuya Takahashi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 35/10 (2006.01);
U.S. Cl.
CPC ...
G01N 35/1004 (2013.01); G01N 35/1016 (2013.01);
Abstract

A cleaning water flow velocity during nozzle cleaning is momentarily changed by using a pressure changing mechanism, for example, a syringe. That is, after the start of cleaning, a solenoid valve is opened, and an aspirating operation of the syringe is momentarily performed by a fixed amount in a state where a flow of cleaning water in a nozzle is developed, whereby a nozzle flow velocity is momentarily decelerated. Immediately thereafter, the syringe is pushed back to a home position again, and the flow velocity in the nozzle is accelerated again. A cleaning effect can be improved by performing transition of velocity distribution to various states. Flow velocity control by the pressure changing mechanism can be realized without inhibiting a dispensing cycle, and the cleaning effect of the nozzle can be improved without changing the pressure of a liquid feeding pump or extending the cleaning time.


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