The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
Dec. 29, 2017
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Ulis, Veurey Voroize, FR;
Sébastien Cortial, Sassenage, FR;
Marc Guillaumont, Grenoble, FR;
Denis Pelenc, Quaix en Chartreuse, FR;
Xavier Zucchi, Vaulnaveys-le-Haut, FR;
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris, FR;
ULIS, Veurey Voroize, FR;
Abstract
An infrared radiation detector includes an array of elementary imaging bolometric detectors, each of the elementary bolometric detectors being formed of a bolometric membrane including a film made of vanadium oxide VOx, having a resistivity in the range from 6 ohm·cm to 50 ohm·cm, said membrane being suspended above a substrate integrating a signal for reading out the signal generated by said elementary detectors and for sequentially addressing the elementary detectors. The detector includes at least one getter intended to ensure the trapping of residual gas during and after the forming of the detector, and includes a hermetically-sealed cavity having said array and said at least one getter housed therein, having an upper cap including a window transparent to infrared radiation, said cap being sealed by means of a seal on a chip supporting the array of elementary detectors or on a package at the bottom of which the chip supporting the array of elementary detectors has been attached, said cavity being under vacuum or a low pressure.