The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
Dec. 18, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Ippei Yanagisawa, Sagamihara, JP;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 11/24 (2006.01); C25D 11/16 (2006.01); H05B 6/10 (2006.01); C25D 17/16 (2006.01); C25D 21/12 (2006.01);
U.S. Cl.
CPC ...
C25D 11/16 (2013.01); C25D 11/246 (2013.01); C25D 17/16 (2013.01); C25D 21/12 (2013.01); H05B 6/105 (2013.01);
Abstract
Examples of a susceptor for supporting a substrate includes a base metal formed of aluminum or a material containing aluminum, an anodized layer covering a surface of the base metal and having cracks therein, and a CF coating of polymer provided in the cracks such that the exposure of the base metal is avoided.