The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
May. 07, 2018
Samsung Display Co., Ltd., Yongin-si, KR;
Taekil Oh, Yongin-si, KR;
Gyoowan Han, Yongin-si, KR;
Wonyong Kim, Yongin-si, KR;
Seungho Myoung, Yongin-si, KR;
Jaeseok Park, Yongin-si, KR;
Alexander Voronov, Yongin-si, KR;
Jinhong Jeun, Yongin-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.