The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2022

Filed:

Jun. 18, 2019
Applicant:

Visera Technologies Company Limited, Hsin-Chu, TW;

Inventors:

Shao-Wei Ma, Kaohsiung, TW;

Chang-Wei Chen, Kaohsiung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/50 (2006.01); H01J 37/34 (2006.01); B05B 13/02 (2006.01); B05B 7/04 (2006.01); B05B 13/04 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B05B 13/0242 (2013.01); B05B 7/0416 (2013.01); B05B 13/0285 (2013.01); B05B 13/0405 (2013.01); B05B 13/0442 (2013.01); C23C 14/505 (2013.01); H01J 37/32431 (2013.01); H01J 37/3411 (2013.01);
Abstract

A coating apparatus includes a process chamber, a rotation device, and a rotation holder. The rotation device is disposed in the process chamber. The rotation holder is connected to the rotation device. The rotation holder includes two extension elements, two retaining elements, and two pins. The two extension elements are disposed around a center axis and separated from each other, wherein each of the two extension elements has a side surface. Each of the two retaining elements has a bottom surface, one of the two retaining elements is connected to one of the side surfaces, and the other of the two retaining elements is connected to the other of the side surfaces. One of the two pins is connected to one of the bottom surfaces, and the other of the two pins is connected to the other of the bottom surfaces.


Find Patent Forward Citations

Loading…