The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2022

Filed:

Jul. 29, 2019
Applicant:

Avago Technologies International Sales Pte. Limited, Singapore, SG;

Inventor:

Qing Liu, Irvine, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 21/762 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7827 (2013.01); H01L 21/762 (2013.01); H01L 29/66666 (2013.01);
Abstract

A semiconductor structure includes a substrate having a top surface, pillar structures formed on top of the substrate, a gate conductor, a drain/source region and a source/drain region. Each pillar structure of the pillar structures includes a first end and a second end, and the first end is closer to the substrate than the second end. The gate conductor surrounds each of the pillar structures disposed between the first end and the second end. The drain/source region is at the top surface of the substrate and in contact with the first end of a first pillar structure of the pillar structures, and the source/drain region is at the top surface of the substrate and in contact with the first end of a second pillar structure of the pillar structures.


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