The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2022
Filed:
May. 15, 2018
Applicant:
Ksm Component Co., Ltd., Gimpo-si, KR;
Inventors:
Yun Ho Kim, Seoul, KR;
Joo Hwan Kim, Seoul, KR;
Assignee:
KSM COMPONENT CO., LTD., Gimpo-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C04B 35/581 (2006.01); C04B 35/645 (2006.01); C04B 35/626 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C04B 35/581 (2013.01); C04B 35/6261 (2013.01); C04B 35/6264 (2013.01); C04B 35/62655 (2013.01); C04B 35/645 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3229 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/3886 (2013.01); C04B 2235/604 (2013.01); C04B 2235/606 (2013.01); C04B 2235/656 (2013.01); C04B 2235/87 (2013.01);
Abstract
One embodiment of the present invention discloses an electrostatic chuck made of an aluminum nitride sintered body, wherein the aluminum nitride sintered body comprises aluminum nitride and a composite oxide formed along the grain boundaries of the aluminum nitride, wherein the composite oxide comprises at least two kinds of rare earth metals which have a solid-solution relationship with each other, and wherein the composite oxide comprises a collection area having a higher oxygen content than a surrounding area.