The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2022

Filed:

Oct. 25, 2016
Applicant:

Jsw Aktina System Co., Ltd., Yokohama, JP;

Inventors:

Daisuke Ito, Kanagawa, JP;

Junichi Shida, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B23K 26/14 (2014.01); B23K 26/142 (2014.01); C03B 25/02 (2006.01); B23K 26/073 (2006.01); B23K 26/08 (2014.01); B23K 26/352 (2014.01); B23K 26/0622 (2014.01); B23K 26/354 (2014.01); H01L 21/02 (2006.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01); B23K 101/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); B23K 26/0622 (2015.10); B23K 26/0738 (2013.01); B23K 26/083 (2013.01); B23K 26/142 (2015.10); B23K 26/1476 (2013.01); B23K 26/352 (2015.10); B23K 26/354 (2015.10); C03B 25/02 (2013.01); C03B 25/025 (2013.01); H01L 21/02592 (2013.01); H01L 21/02686 (2013.01); B23K 2101/18 (2018.08); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08); H01L 21/02532 (2013.01); H01L 21/02691 (2013.01);
Abstract

A laser treatment device performing treatment by irradiating a target object having a plate surface with laser light, including: a light-transmitting region transmitting laser light emitted onto the target object; a rectifier that has a rectifier surface separated from the target object and extending along the plate surface of the target object and outward from the end of the light-transmitting region; a gas supply unit that feeds a gas to a gap between one side of the rectifier surface and the light-transmitting region, in a position separated from the light-transmitting region; and a gas exhaust unit that exhausts, on the other side that is on the other side of the light-transmitting region from the one side, the gas present in a gap between the rectifier surface and the target object from the gap, in a position separated from the light-transmitting region, thereby generating a stable local gas atmosphere.


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