The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2022
Filed:
Jun. 12, 2020
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Teppei Tanaka, Kanagawa, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); H01L 21/67115 (2013.01); H01L 22/12 (2013.01);
Abstract
A chuck plate is disposed between an annealing object and a holding table. The chuck plate has a function of attenuating thermal radiation light radiated from the annealing object and directed toward the holding table. The use of the chuck plate makes it possible to increase the accuracy of temperature measured by detection of thermal radiation light.
Tanaka, Teppei. (2022). Chuck plate, annealing device, and annealing method (U.S. Patent No. 11355344). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11355344
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile