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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11355343 B1

PDFFull Text
Date of Patent:
Jun. 07, 2022

Filed:

Jun. 02, 2017

Laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device

Applicant:

Jsw Aktina System Co., Ltd., Yokohama, JP;

Inventors:

Takahiro Mikami, Yokohama, JP;

Takahiro Fuji, Yokohama, JP;

Yuki Suzuki, Yokohama, JP;

Yoshihiro Yamaguchi, Yokohama, JP;

Assignee:

JSW AKTINA SYSTEM CO., LTD., Yokohama, JP;

Attorney:

SGPatents PLLC

Primary Examiner:

Kaitlin S Joerger

Int. Cl.
CPC ...
H01L 21/268 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01); H01L 21/683 (2006.01); H01L 21/677 (2006.01); B23K 26/073 (2006.01); B65G 49/06 (2006.01); B23K 26/352 (2014.01); B23K 26/08 (2014.01); B23K 26/00 (2014.01); H01L 21/67 (2006.01); B23K 37/047 (2006.01); B65G 49/05 (2006.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/0006 (2013.01); B23K 26/0732 (2013.01); B23K 26/0738 (2013.01); B23K 26/083 (2013.01); B23K 26/0823 (2013.01); B23K 26/352 (2015.10); B23K 37/047 (2013.01); B65G 49/065 (2013.01); H01L 21/02532 (2013.01); H01L 21/02675 (2013.01); H01L 21/02691 (2013.01); H01L 21/677 (2013.01); H01L 21/6776 (2013.01); H01L 21/67115 (2013.01); H01L 21/67715 (2013.01); H01L 21/67784 (2013.01); H01L 21/67787 (2013.01); H01L 21/687 (2013.01); H01L 21/6838 (2013.01); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08); B65G 49/05 (2013.01); B65G 2249/04 (2013.01);
Abstract

A laser irradiation apparatus () according to one embodiment includes a laser generating device () that generates a laser beam, a flotation unit () that causes a workpiece () that is to be irradiated with the laser beam to float, and a conveying unit () that conveys the floating workpiece (). The conveying unit () conveys the workpiece () with the conveying unit () holding the workpiece () at a position where the conveying unit () does not overlap an irradiation position () of the laser beam. The laser irradiation apparatus () according to one embodiment makes it possible to suppress uneven irradiation with a laser beam.

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