The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2022

Filed:

Feb. 12, 2021
Applicants:

Ut-battelle, Llc, Oak Ridge, PA (US);

University of Tennessee Research Foundation, Knoxville, TN (US);

Inventors:

Anton V. Ievlev, Knoxville, TN (US);

Olga S. Ovchinnikova, Knoxville, TN (US);

Matthias Lorenz, Toronto, CA;

Yongtao Liu, Knoxville, TN (US);

Assignees:

UT-BATTELLE, LLC, Oak Ridge, TN (US);

UNIVERSITY OF TENNESSEE RESEARCH FOUNDATION, Knoxville, TN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/40 (2006.01); H01J 49/00 (2006.01); H01J 49/02 (2006.01);
U.S. Cl.
CPC ...
H01J 49/408 (2013.01); H01J 49/0031 (2013.01); H01J 49/022 (2013.01);
Abstract

A method of performing time-of-flight secondary ion mass spectrometry on a sample includes the step of directing a beam of primary ions to the sample, and stimulating the migration of ions within the sample while the beam of primary ions is directed at the sample. The stimulation of the ions is cycled between a stimulation state and a lower stimulation state. Secondary ions emitted from the sample by the beam of primary ions are collected in a time-of-flight mass spectrometer. Time-of-flight secondary ion mass spectrometry is then performed on the secondary ions. A system for performing time-of-flight secondary ion mass spectrometry on a sample is also disclosed.


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