The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2022

Filed:

Aug. 23, 2017
Applicant:

Sumitomo Metal Mining Co., Ltd., Tokyo, JP;

Inventor:

Hideharu Okami, Niihama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/56 (2006.01); C23C 16/455 (2006.01); C23C 14/35 (2006.01); C23C 14/02 (2006.01); H01J 37/32 (2006.01); C23C 14/20 (2006.01); G11B 5/85 (2006.01); C23C 14/16 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45534 (2013.01); C23C 14/021 (2013.01); C23C 14/025 (2013.01); C23C 14/205 (2013.01); C23C 14/3407 (2013.01); C23C 14/35 (2013.01); C23C 14/562 (2013.01); G11B 5/85 (2013.01); H01J 37/3277 (2013.01); B65H 2301/51145 (2013.01); C23C 14/165 (2013.01); C23C 14/568 (2013.01);
Abstract

A treatment apparatus includes two can rolls provided on a transfer path through which a long resin film is transferred in a roll-to-roll manner in a vacuum chamber; and surface treatment means facing an outer circumference of each of the can rolls to treat a surface of the long resin film cooled by being wound around the outer circumference. The downstream can roll is provided with upper and lower two sets of feeding and sending systems, and one surface of the long resin film in contact with the outer circumference of the downstream can roll at a time when the long resin film travels through the lower one of the two sets of feeding and sending systems is opposite to the other surface of the resin film in contact with the outer circumference of the downstream can roll at a time when the resin film travels through the upper one.


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