The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2022

Filed:

Jan. 05, 2018
Applicant:

Japan Science and Technology Agency, Saitama, JP;

Inventors:

Hiroki Ago, Fukuoka, JP;

Kenji Kawahara, Fukuoka, JP;

Yuki Uchida, Fukuoka, JP;

Sho Nakandakari, Fukuoka, JP;

Daichi Tanaka, Fukuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
C23C 16/342 (2013.01); H01L 29/786 (2013.01);
Abstract

The present invention is to provide: a method for producing a novel hexagonal boron nitride thin film suitable for industrial use such as application to electronics, in which a hexagonal boron nitride thin film having a large area, a uniform thickness of 1 nm or more, with few grain boundaries can be produced inexpensively; and a hexagonal boron nitride thin film. The hexagonal boron nitride thin film according to the present invention is characterized by having a thickness of 1 nm or more, and an average value of the full width at half maximum of the Epeak obtained from Raman spectrum of 9 to 20 cm.


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